This presentation explores how AI enabled control system enables next-generation facility management through intelligent closed-loop control. AI enabled control system seamlessly integrates data analytics with facility control systems, continuously monitoring real-time operational data across HVAC, cleanroom, water management, environments, and energy management systems. By employing advanced AI algorithms, it identifies optimization opportunities and automatically adjusts control parameters, eliminating the traditional gap between analysis and action. This closed-loop approach enables dynamic response to changing conditions while minimizing energy consumption, reducing water usage, and optimizing resource allocation. Through real-world case studies, we demonstrate measurable improvements in energy efficiency, carbon footprint reduction, and operational cost savings. As the industry advances toward net-zero goals, AI-powered closed-loop control represents a fundamental shift in achieving sustainable semiconductor manufacturing in an increasingly resource-constrained world.