Shih-Cheng Hu
Chair Professor
National Taipei University of Technology
Education
- PhD (The University of Liverpool)
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Experience
Professor Hu joined the National Taipei University of Technology (NTUT) in 1998 as an assistant professor, after serving as a building service engineer for two years and as a staff researcher at the Industrial Technology Research Institute (ITRI) Taiwan for six years. He was promoted to full professor in 2006 and received the honor “Distinguished Professor” in 2014. In 2022, he was awarded the title “University Chair Professor”, recognizing his distinguished accomplishments in research and creative works. Prof. Hu is one of the renowned researchers in the field of contamination control for nanoscale semiconductor manufacturing processes. His novel innovation "a total solution on humidity/oxygen control for wafer automatic handling system” has been imbedded and became a standard installation for sub. 10nm process equipment utilized today. Prof. Hu was the editor-in-chief of the Journal of Clean Technology from 2004 to 2010 (in Traditional Chinese Language). He is the major co-author of the book “American Society of Heating, Refrigerating, and Air-Conditioning Engineers (ASHRAE) Cleanroom Design Guide”, with 21 chapters/425 pages. He has received many University/Government awards including the National Award for Distinguished Contribution to Industry-Academia Cooperation, a top award arranged by the Ministry of Education of the TAIWAN government, and conferred by the President of TAIWAN. He is a Fellow grade member of the ASHRAE.
Speech Title and Abstract
The past, present, and future energy-saving strategies and successful examples of high-tech Fabs.
The largest share of electricity consumption in Taiwan is in the industrial sector, accounting for 54%. The electronic industry accounts for 37%, the largest share. The demand and share are constantly increasing. This topic is aimed at Taiwan's electronic high-tech factories and conducts investigation and analysis. Its energy consumption patterns and energy-saving potential, and focusing on the most energy-consuming clean air-conditioning system, propose several energy-saving strategies and evidence.
First, we collected energy consumption data at 100% capacity from 38 Taiwan's electronics industry giants: silicon wafer, wafer foundry, display LCD panel factory, semiconductor test, and packaging factory. We checked the reported data, supplemented by on-site inspection. Telephone interviews were conducted and then compiled into reports for verification and feedback analysis, and unit energy consumption indicators for products were established. Then, with the help of FES (Fab Energy Simulation) software and ECFs (Energy Conversion Factors), six clean air conditioning energy-saving strategies were verified in semiconductor factories: lowering the design temperature and humidity of the clean room, reducing the air supply volume of the external air conditioning box, and using a single duct Replace the double-pipe exhaust of the outdoor air conditioning box, lower the air supply temperature of the outdoor air conditioning box, regularly replace and use low-pressure loss high-efficiency filters, and calculate the annual energy saving effect.
Finally, the energy-saving methods are summarized, their differences are analyzed, and tables are made for reference in implementing energy-saving design and energy-saving measures.