K&S Advanced Systems Ltd.
B.Sc.E.E. In Electronics Engineering from Tel-Aviv University
COO at Larch Networks
Hardware (Electronics) Group Manager in Stanley Healthcare
V.P R&D at ITS Telecom
Topic & Abstract
Vibration Control as a Critical parameter in FAB's
Semiconductors production lines including Thousands different tools and instruments.
Most tools having strict vibrations level prerequisites, coming from Machine Manufacturers
• How the FABs currently dealing with unwanted vibrations?
Challenges in moving to 7,5,3nm Junction Node Technology
• The machines Level become more precision
• The requirements from the FAB facilities growing up as well,
especially in Vibrations control
• Vibration Control perspectives in moving to new technology in Semiconductors production facilities
Technical Comparison between Passive (Concrete Pedestals), Pneumatic (Air - based) Vibration Isolation, Active Vibration Control
Smart FAB – reduce machine down time, improve preventing maintenance – How these related to vibrations problems and What is the new approach, using IOT – Industry 4.0 Approach
Active Vibration Control in FABs for precision processes – Worldwide trends