Vibration Control as a Critical parameter in FAB's


Summary

Semiconductors production lines including Thousands different tools and instruments.
Most tools having strict vibrations level prerequisites, coming from Machine Manufacturers
• How the FABs currently dealing with unwanted vibrations?

Challenges in moving to 7,5,3nm Junction Node Technology
• The machines Level become more precision
• The requirements from the FAB facilities growing up as well,
especially in Vibrations control
• Vibration Control perspectives in moving to new technology in Semiconductors production facilities

Technical Comparison between Passive (Concrete Pedestals), Pneumatic (Air - based) Vibration Isolation, Active Vibration Control

Smart FAB – reduce machine down time, improve preventing maintenance – How these related to vibrations problems and What is the new approach, using IOT – Industry 4.0 Approach

Active Vibration Control in FABs for precision processes – Worldwide trends