top of page

Sustainable Development of High-Tech Facilities Empowered by Digital Transformation

Tony Chan

Speaker

Senior Business Manager in New Fast Technology (2018 – present)

  • To lead NF team to develop the market demand for automatic monitoring equipment for AMC (airborne molecular contamination) in Taiwan semiconductor industry.

  • To do matchmaking clients’ needs with the technology of the R&D side and assist the company’s internal projects to do development expansion and sales for new products, and it is expected that New Fast Technology company can contribute to the promotion of Taiwan's semiconductor yield.

Business Manager in Thermo Fisher Scientific Technology (Taiwan) (2013 – 2018)

  • To promote testing instruments and total application solutions for semiconductor laboratories for the USA headquarters — in GCMS/IC/LC/ICPMS and other related testing fields.

  • Focus on professional sales and maintenance services for semiconductor wafer manufacturers, DRAM factories, LCD factories, universities, and research units, providing high-level analysis and application solutions.

Assistant Business Manager in Metrohm Technology (1997 – 2013)

  • Working in TW subsidiary of Switzerland instrument manufacturer — Metrohm.

  • To sell instruments in IC testing with professional services and promote high-level analysis application solutions for semiconductor wafer manufacturers, DRAM factories, LCD factories, and educational units.

1.jpg

Education

Taipei City University of Science and Technology-Department of Chemical Engineering

Experience

Senior Business Manager in New Fast Technology (2018 – present)

  • To lead NF team to develop the market demand for automatic monitoring equipment for AMC (airborne molecular contamination) in Taiwan semiconductor industry.

  • To do matchmaking clients’ needs with the technology of the R&D side and assist the company’s internal projects to do development expansion and sales for new products, and it is expected that New Fast Technology company can contribute to the promotion of Taiwan's semiconductor yield.

Business Manager in Thermo Fisher Scientific Technology (Taiwan) (2013 – 2018)

  • To promote testing instruments and total application solutions for semiconductor laboratories for the USA headquarters — in GCMS/IC/LC/ICPMS and other related testing fields.

  • Focus on professional sales and maintenance services for semiconductor wafer manufacturers, DRAM factories, LCD factories, universities, and research units, providing high-level analysis and application solutions.

Assistant Business Manager in Metrohm Technology (1997 – 2013)

  • Working in TW subsidiary of Switzerland instrument manufacturer — Metrohm.

  • To sell instruments in IC testing with professional services and promote high-level analysis application solutions for semiconductor wafer manufacturers, DRAM factories, LCD factories, and educational units.

Speech Title and Abstract

One-Stop Facility Monitoring System for Zero-Defect Wafer Surface Organic Contamination

Introduction

As semiconductor manufacturing advances towards 3nm and even more precise technology nodes, micro-contamination on wafer surfaces has become a critical bottleneck affecting yield, reliability, and production costs. Particularly in high-temperature processes, trace volatile organic compounds (VOCs) released from process materials, equipment components, and the cleanroom environment itself can adsorb onto the wafer surface. This can lead to pattern defects, degraded photoresist performance, and even damage to expensive EUV optical components. Traditional, reactive post-mortem analysis is no longer sufficient for the "zero-defect" requirements of advanced processes. Therefore, establishing a proactive, real-time, and comprehensive "One-Stop Facility Monitoring System for Zero-Defect Wafer Surface Organic Contamination" has become an urgent task to ensure stable semiconductor production.

WOS Inspection: From Reactive to Proactive Defense

Wafer Outgassing Sampling (WOS) inspection is a crucial step for detecting organic contaminants on wafer surfaces. We know that simply testing ambient air cannot fully simulate the actual heating conditions a wafer experiences during processing. WOS technology accurately captures the VOCs released from a wafer or critical materials by placing them in a sealed chamber under simulated process conditions. This is then combined with high-sensitivity analysis techniques like TD-GC-MS for qualitative and quantitative analysis. This technology not only verifies the cleanliness of incoming materials but also serves as a powerful tool for tracing process abnormalities and improving yield.

Our system integrates WOS inspection data into a real-time monitoring network, enabling facility personnel to manage risks at the source, make preemptive adjustments, and prevent batch-related disasters.

Innovative Application of the One-Stop Monitoring System

This presentation will introduce an innovative “one-stop facility monitoring system” that seamlessly integrates WOS inspection with online real-time monitoring technology to achieve comprehensive, dynamic management of organic contamination.

(1% Yield Improvement: Over $288 Million in Annual Operating Profit)

Rm 310, No. 88, Zhuangjing 1st Road, Zhubei City, Hsinchu County, Taiwan

Copyright Taiwan High-Tech  Facility Association. All rights reserved

bottom of page