Next Generation Technology of AMC Micro-contamination Analysis & Onsite Application Blueprint
(移動型實驗室 - 次世代 AMC 微汙染量測分析技術及現址應用網絡)


Over the years with the advancement of semiconductor industry, AMC management has become one of the critical elements in the establishment of high-tech facility.

The coverage of AMC monitoring has been expanded from cleanroom environment to micro-enclosures (e.g. FOUP/Processing Equipment/Chemical Filters).

The integration of AI technology is expected to bring advantages to facility operation -> AMC monitoring on AGV platform

On top of that, the management of external contamination is as significant. The realization of onsite monitoring with real time data at facility fence - line and community area has come under the spotlight to address the importance of corporate ESG.