The first-ever integration of pre-washer into the MAU system utilizes to achieve five key benefits: “energy saving”, “waste reduction”, “water saving”, “AMC removal”, and “stable cleanroom temperature and humidity.”

Energy-saving:
Spray cooling and condensate recovery enable efficient pre-treatment of outdoor air by reducing its temperature and enthalpy, thereby lowering chilled water consumption.

Reduction of Waste:
Replacing traditional pre-/bag filters with a pre-washer design achieves equal filtration efficiency and eliminates filter waste.

Water-saving:
Condensate recovery supports outdoor air pre-washer, lowering DI water use in the original air washer room and enhancing water efficiency.

Enhance AMC Removal Efficiency:
Integrating pre-washer with the existing air washer forms a two-stage washing process, enhancing AMC removal efficiency and improving cleanroom air quality.

Cleanroom Temperature and Humidity Stability Improvement:
Pre-washer design stabilizes outdoor air conditions, reducing MAU temperature and humidity fluctuations caused by sudden changes.